Refer to this review paper: Yan, F., Powell, D.R., Curtis, D.J. et al. From reads to insight: a hitchhiker’s guide to ATAC-seq data analysis. Genome Biol 21, 22 (2020). https://doi.org/10.1186/s13059-020-1929-3
Also the ENCODE specification here.
fastqc
trimmomatic
fastqc
bwa index
bwa mem
picard MarkDuplicates picard CollectAlignmentSummaryMetrics picard CollectInsertSizeMetrics
samtools MT removal, low quality removal, unmapped/unpaired/not proper paired removal % mapped, % chrM, % dup, % after all filtering PBC1, PBC2, and NRF
perl scripts
macs2 shift and extend mode, narrowpeak with summit, broad mode HMMRATAC
upsetplot, ChIPseeker
FIMO, Homer
HINT-ATAC