diff --git a/tools/Invoke-Preprocessing.ps1 b/tools/Invoke-Preprocessing.ps1
old mode 100644
new mode 100755
index c9692fc68..19f9adaf9
--- a/tools/Invoke-Preprocessing.ps1
+++ b/tools/Invoke-Preprocessing.ps1
@@ -74,16 +74,17 @@
 
     $count = $ExcludedFiles.Count
     if ((-NOT ($count -eq 0)) -AND (-NOT $SkipExcludedFilesValidation)) {
+        $failedFilesList = @()
         for ($i = 0; $i -lt $count; $i++) {
             $excludedFile = $ExcludedFiles[$i]
-            $filePath = "$(($WorkingDir -replace ('\\$', '')) + '\' + ($excludedFile -replace ('\.\\', '')))"
-            if (-NOT (Get-ChildItem -Recurse -Path "$filePath" -File)) {
-                $failedFilesList += "'$filePath', "
+            $filePath = Join-Path $WorkingDir ($excludedFile -replace '^\.\', '')
+            if (-NOT (Get-Item -Path $filePath -Force -ErrorAction SilentlyContinue)) {
+                $failedFilesList += "'$filePath'"
             }
         }
-        $failedFilesList = $failedFilesList -replace (',\s*$', '')
-        if (-NOT $failedFilesList -eq "") {
-            throw "[Invoke-Preprocessing] One or more File Paths & File Patterns were not found, you can use '-SkipExcludedFilesValidation' switch to skip this check, and the failed files are: $failedFilesList"
+        if ($failedFilesList.Count -gt 0) {
+            $failedFilesString = $failedFilesList -join ', '
+            throw "[Invoke-Preprocessing] One or more File Paths & File Patterns were not found, you can use '-SkipExcludedFilesValidation' switch to skip this check, and the failed files are: $failedFilesString"
         }
     }