diff --git a/.prettierignore b/.prettierignore
index d289a030..47415c69 100644
--- a/.prettierignore
+++ b/.prettierignore
@@ -8,4 +8,4 @@
 /tap-snapshots
 /.nyc_output
 /coverage
-/benchmark
+/benchmark/old-rimraf
diff --git a/benchmark/create-fixture.js b/benchmark/create-fixture.js
index 99e7348a..3ce172ef 100644
--- a/benchmark/create-fixture.js
+++ b/benchmark/create-fixture.js
@@ -1,24 +1,25 @@
-const { writeFile: writeFile_ } = require('fs')
-const writeFile = async (path, data) => new Promise((res, rej) =>
-  writeFile_(path, data, er => er ? rej(er) : res()))
-const { mkdirp } = require('mkdirp')
-const { resolve } = require('path')
+import { writeFile as writeFile_ } from 'fs'
+const writeFile = async (path, data) =>
+  new Promise((res, rej) =>
+    writeFile_(path, data, er => (er ? rej(er) : res())),
+  )
+import { mkdirp } from 'mkdirp'
+import { resolve } from 'path'
 
 const create = async (path, start, end, maxDepth, depth = 0) => {
   await mkdirp(path)
   const promises = []
   for (let i = start; i <= end; i++) {
     const c = String.fromCharCode(i)
-    if (depth < maxDepth && (i-start >= depth))
+    if (depth < maxDepth && i - start >= depth)
       await create(resolve(path, c), start, end, maxDepth, depth + 1)
-    else
-      promises.push(writeFile(resolve(path, c), c))
+    else promises.push(writeFile(resolve(path, c), c))
   }
   await Promise.all(promises)
   return path
 }
 
-module.exports = async ({ start, end, depth, name }) => {
-  const path = resolve(__dirname, 'fixtures', name, 'test')
+export default async ({ start, end, depth, name }) => {
+  const path = resolve(import.meta.dirname, 'fixtures', name, 'test')
   return await create(path, start.charCodeAt(0), end.charCodeAt(0), depth)
 }
diff --git a/benchmark/index.js b/benchmark/index.js
index 90928a20..d5a45d75 100644
--- a/benchmark/index.js
+++ b/benchmark/index.js
@@ -1,17 +1,17 @@
-const cases = require('./rimrafs.js')
-const runTest = require('./run-test.js')
-const print = require('./print-results.js')
+import cases from './rimrafs.js'
+import runTest from './run-test.js'
+import print from './print-results.js'
 
-const rimraf = require('../')
+import * as rimraf from '../dist/esm/index.js'
 const main = async () => {
   // cleanup first.  since the windows impl works on all platforms,
   // use that.  it's only relevant if the folder exists anyway.
-  rimraf.sync(__dirname + '/fixtures')
+  rimraf.sync(import.meta.dirname + '/fixtures')
   const results = {}
   for (const name of Object.keys(cases)) {
     results[name] = await runTest(name)
   }
-  rimraf.sync(__dirname + '/fixtures')
+  rimraf.sync(import.meta.dirname + '/fixtures')
   return results
 }
 
diff --git a/benchmark/print-results.js b/benchmark/print-results.js
index 831e3309..61f7783c 100644
--- a/benchmark/print-results.js
+++ b/benchmark/print-results.js
@@ -11,7 +11,7 @@ const variance = list => {
 const stddev = list => {
   const v = variance(list)
   if (isNaN(v)) {
-    console.error({list, v})
+    console.error({ list, v })
     throw new Error('wat?')
   }
   return sqrt(variance(list))
@@ -28,8 +28,8 @@ const nums = list => ({
 })
 
 const printEr = er => `${er.code ? er.code + ': ' : ''}${er.message}`
-const failures = list => list.length === 0 ? {}
-  : { failures: list.map(er => printEr(er)).join('\n') }
+const failures = list =>
+  list.length === 0 ? {} : { failures: list.map(er => printEr(er)).join('\n') }
 
 const table = results => {
   const table = {}
@@ -49,7 +49,7 @@ const table = results => {
   }
   // sort by mean time
   return Object.entries(table)
-    .sort(([, {mean:a}], [, {mean:b}]) => a - b)
+    .sort(([, { mean: a }], [, { mean: b }]) => a - b)
     .reduce((set, [key, val]) => {
       set[key] = val
       return set
@@ -62,4 +62,4 @@ const print = results => {
   console.table(table(results))
 }
 
-module.exports = print
+export default print
diff --git a/benchmark/rimrafs.js b/benchmark/rimrafs.js
index aefbabfe..f4da741f 100644
--- a/benchmark/rimrafs.js
+++ b/benchmark/rimrafs.js
@@ -1,24 +1,25 @@
 // just disable the glob option, and promisify it, for apples-to-apples comp
+import { promisify } from 'util'
+import { createRequire } from 'module'
 const oldRimraf = () => {
-  const {promisify} = require('util')
-  const oldRimraf = require('./old-rimraf')
+  const oldRimraf = createRequire(import.meta.filename)('./old-rimraf')
   const pOldRimraf = promisify(oldRimraf)
   const rimraf = path => pOldRimraf(path, { disableGlob: true })
   const sync = path => oldRimraf.sync(path, { disableGlob: true })
   return Object.assign(rimraf, { sync })
 }
 
-const { spawn, spawnSync } = require('child_process')
+import { spawn, spawnSync } from 'child_process'
 const systemRmRf = () => {
-  const rimraf = path => new Promise((res, rej) => {
-    const proc = spawn('rm', ['-rf', path])
-    proc.on('close', (code, signal) => {
-      if (code || signal)
-        rej(Object.assign(new Error('command failed'), { code, signal }))
-      else
-        res()
+  const rimraf = path =>
+    new Promise((res, rej) => {
+      const proc = spawn('rm', ['-rf', path])
+      proc.on('close', (code, signal) => {
+        if (code || signal)
+          rej(Object.assign(new Error('command failed'), { code, signal }))
+        else res()
+      })
     })
-  })
   rimraf.sync = path => {
     const result = spawnSync('rm', ['-rf', path])
     if (result.status || result.signal) {
@@ -31,10 +32,11 @@ const systemRmRf = () => {
   return rimraf
 }
 
-module.exports = {
-  native: require('../').native,
-  posix: require('../').posix,
-  windows: require('../').windows,
+import { native, posix, windows } from 'rimraf'
+export default {
+  native,
+  posix,
+  windows,
   old: oldRimraf(),
   system: systemRmRf(),
 }
diff --git a/benchmark/run-test.js b/benchmark/run-test.js
index a9fe6da4..4a2f0b8b 100644
--- a/benchmark/run-test.js
+++ b/benchmark/run-test.js
@@ -3,16 +3,15 @@ const END = process.env.RIMRAF_TEST_END_CHAR || 'f'
 const DEPTH = +process.env.RIMRAF_TEST_DEPTH || 5
 const N = +process.env.RIMRAF_TEST_ITERATIONS || 7
 
-const cases = require('./rimrafs.js')
+import cases from './rimrafs.js'
 
-const create = require('./create-fixture.js')
+import create from './create-fixture.js'
 
-const hrToMS = hr => Math.round(hr[0]*1e9 + hr[1]) / 1e6
+const hrToMS = hr => Math.round(hr[0] * 1e9 + hr[1]) / 1e6
 
-const runTest = async (type) => {
+const runTest = async type => {
   const rimraf = cases[type]
-  if (!rimraf)
-    throw new Error('unknown rimraf type: ' + type)
+  if (!rimraf) throw new Error('unknown rimraf type: ' + type)
 
   const opt = {
     start: START,
@@ -62,10 +61,12 @@ const runTest = async (type) => {
   const startAsync = process.hrtime()
   for (const path of asyncPaths) {
     const start = process.hrtime()
-    await rimraf(path).then(
-      () => asyncTimes.push(hrToMS(process.hrtime(start))),
-      er => asyncFails.push(er)
-    ).then(() => process.stderr.write('.'))
+    await rimraf(path)
+      .then(
+        () => asyncTimes.push(hrToMS(process.hrtime(start))),
+        er => asyncFails.push(er),
+      )
+      .then(() => process.stderr.write('.'))
   }
   const asyncTotal = hrToMS(process.hrtime(startAsync))
   console.error('done! (%j ms, %j failed)', asyncTotal, asyncFails.length)
@@ -77,10 +78,14 @@ const runTest = async (type) => {
   const paraRuns = []
   for (const path of paraPaths) {
     const start = process.hrtime()
-    paraRuns.push(rimraf(path).then(
-      () => paraTimes.push(hrToMS(process.hrtime(start))),
-      er => paraFails.push(er)
-    ).then(() => process.stderr.write('.')))
+    paraRuns.push(
+      rimraf(path)
+        .then(
+          () => paraTimes.push(hrToMS(process.hrtime(start))),
+          er => paraFails.push(er),
+        )
+        .then(() => process.stderr.write('.')),
+    )
   }
   await Promise.all(paraRuns)
   const paraTotal = hrToMS(process.hrtime(startPara))
@@ -97,4 +102,4 @@ const runTest = async (type) => {
   }))
 }
 
-module.exports = runTest
+export default runTest