diff --git a/python/sglang/srt/layers/attention/wave_backend.py b/python/sglang/srt/layers/attention/wave_backend.py
index 13aaafe77ffd..38e1224cbb12 100644
--- a/python/sglang/srt/layers/attention/wave_backend.py
+++ b/python/sglang/srt/layers/attention/wave_backend.py
@@ -6,6 +6,7 @@
 import torch
 import triton
 import triton.language as tl
+import logging
 
 from sglang.srt.layers.attention.base_attn_backend import AttentionBackend
 from sglang.srt.layers.attention.utils import create_flashinfer_kv_indices_triton
@@ -18,6 +19,7 @@
     from sglang.srt.model_executor.model_runner import ModelRunner
     from sglang.srt.speculative.eagle_utils import EagleDraftInput, EagleVerifyInput
 
+logger = logging.getLogger(__name__)
 
 @triton.jit
 def get_num_kv_splits_triton(
@@ -102,6 +104,13 @@ def __init__(
 
         super().__init__()
 
+        # Set unique cache dir for each process to avoid cache write races
+        import iree.turbine.kernel.wave.cache as wave_cache
+        base_cache_dir = wave_cache.CACHE_BASE_DIR
+        new_dir = base_cache_dir / f"worker_{model_runner.tp_rank}"
+        logger.info(f"Setting Wave cache dir: {new_dir}")
+        wave_cache.CACHE_BASE_DIR = new_dir
+
         self.decode_attention_fwd = decode_attention_fwd
         self.extend_attention_fwd = extend_attention_wave